Kính hiển vi điện tử quét Scanning electron microscopy ZEISS SEM EVO10

1. Main purpose of the equipment
The scanning electron microscope is mainly used to observe, analyze and record the microscopic morphology of materials, and can be equipped with an EDS spectrometer to perform composition analysis of material elements.
2. Equipment technical specifications
2.1. Electron optical system
2.1.1 Emission source: tungsten filament
2.1.2 Resolution: high vacuum secondary electron image 3.0nm@30kV
2.1.3 Acceleration voltage range: 200V-30kV, 10V step continuously adjustable
2.1.4 Magnification range: 7X-1,000,000X (film magnification), continuously adjustable, no need for high and low magnification conversion;
2.1.5 Electron beam current: 0.5pA-5μA, continuously adjustable
2.1.6 Electron beam control: with resolution mode, analysis mode, large field of view mode, and large depth of field mode for rapid sample positioning;
2.1.7 Analysis working distance: 8.5mm at 35º exit angle, imaging and analysis can be directly replaced without re-adjusting parameters;
2.2 Vacuum system
2.2.1 Vacuum system: turbomolecular pump + Mechanical pump, no cooling water required;
2.2.2 Maximum vacuum degree of sample chamber: better than 6 x 10-4 Pa;
2.3 Sample chamber and sample stage
2.3.1 Sample chamber size: 310mm (diameter) × 220mm (height);
Sample size: can load 200mm diameter sample;
2.3.2 Sample stage type: fully electric 5-axis motor driven sample stage
Sample stage motor moving range: X=80mm, Y=100mm, Z=35mm, T=0°~ 90°, R=360° (continuous)
2.3.3 The sample stage has contact alarm and automatic stop function
2.3.4 Maximum load weight of the sample stage: 5.0 kg
2.4 Detector
2.4.1 High vacuum secondary electron detector
2.4.2 High sensitivity backscattered electron detector
2.4.3 The original sample chamber infrared CCD camera device can realize the simultaneous operation of the secondary electron detector and CCD without mutual interference.
2.4.4 Oxford Xplore30 electrically cooled spectrometer
2.5 Image display and processing
2.5.1 Image storage resolution (maximum): 32k×24k pixels
2.5.2 Image display resolution: 1024×768 pixels
2.5.3 Image acquisition: pixel averaging, frame averaging, frame integration, row averaging, row integration
2.5.4 Display: 24″ high contrast color flat panel display.
2.5.5 Display mode: full screen display, split screen display, grayscale histogram, contour mode, pseudo color.
2.5.6 Image annotation and data area: standard data area and customized data area are provided, and various electron microscope parameters and characters can be displayed on the image.
2.5.7 Status menu: display various working parameters.
2.5.8 Measurement function: point spacing, angle, diameter and other measurements can be performed on the morphology in the image.
2.5.9 Image output and input:
2.5.9.1 Images can be stored in storage media supported by the operating system or output to a printer.
2.5.9.2 Image storage format: TIF, BMP, JPG
2.5.10 Supporting computer system
2.5.11 Input device: multi-function keyboard and mouse with knob control.
2.5.12 It has a variety of automatic control functions: automatic electron gun start-up, automatic electron gun centering, automatic bias adjustment, automatic barrel parameter control, hysteresis correction, automatic focusing, focus compensation, dynamic focusing, rotation compensation, automatic astigmatism elimination, image mixing, scanning rotation, tilt compensation, image noise reduction processing, and image centering function.